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redraw inv, add schematic, lvs

Browse source 
* update environment for xschem + netgen
* typos
* add lvs for inv using netgen
This commit is contained in:
Pierre Guillod 2023-04-15 18:24:34 +02:00
parent cc77997348
commit 489e257c37
Signed by: pierre
GPG key ID: B00B454469924EDF
15 changed files with 872 additions and 169 deletions
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0
fullcustom/cad/gds/.gitkeep → fullcustom/cad/inv/gds/.gitkeep
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46
fullcustom/cad/inv/mag/inv.mag Normal file
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@ -0,0 +1,46 @@
magic
tech sky130A
magscale 1 2
timestamp 1681569004
<< poly >>
rect 143 479 173 639
rect 87 474 173 479
rect 75 468 173 474
rect 75 434 100 468
rect 135 434 173 468
rect 75 428 173 434
rect 87 423 173 428
rect 143 263 173 423
<< polycont >>
rect 100 434 135 468
<< locali >>
rect 75 434 100 468
rect 135 434 151 468
<< viali >>
rect 100 434 135 468
<< metal1 >>
rect 91 670 137 838
rect 75 468 151 474
rect 75 434 100 468
rect 135 434 151 468
rect 75 428 151 434
rect 179 241 225 670
rect 91 157 137 241
use sky130_fd_pr__nfet_01v8_EDB9KC sky130_fd_pr__nfet_01v8_EDB9KC_0
timestamp 1681568278
transform 1 0 158 0 1 199
box -211 -252 211 252
use sky130_fd_pr__pfet_01v8_MQX2PY sky130_fd_pr__pfet_01v8_MQX2PY_0
timestamp 1681569004
transform 1 0 158 0 1 754
box -211 -303 211 303
<< labels >>
flabel metal1 91 670 137 838 0 FreeSans 160 90 0 0 VDD
port 1 nsew
flabel metal1 91 157 137 241 0 FreeSans 160 90 0 0 VSS
port 2 nsew
flabel metal1 75 428 151 474 0 FreeSans 160 0 0 0 A
port 3 nsew
flabel metal1 179 241 225 670 0 FreeSans 160 0 0 0 X
port 4 nsew
<< end >>

29
fullcustom/cad/mag/sky130_fd_pr__nfet_01v8_EDB9KC.mag → fullcustom/cad/inv/mag/sky130_fd_pr__nfet_01v8_EDB9KC.mag
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@ -1,11 +1,9 @@
magic
tech sky130A
magscale 1 2
timestamp 1681237416
timestamp 1681568278
<< error_p >>
rect -29 114 29 120
rect -29 80 -17 114
rect -29 74 29 80
rect -15 64 15 68
<< pwell >>
rect -211 -252 211 252
<< nmos >>
@ -23,7 +21,8 @@ rect 15 -42 73 -30
rect -61 -30 -27 30
rect 27 -30 61 30
<< psubdiff >>
rect -175 182 175 216
rect -175 182 -117 216
rect 79 182 175 216
rect -175 120 -141 182
rect 141 120 175 182
rect -175 -182 -141 -120
@ -35,37 +34,25 @@ rect -175 -120 -141 120
rect 141 -120 175 120
rect -79 -216 79 -182
<< poly >>
rect -33 114 33 130
rect -33 80 -17 114
rect 17 80 33 114
rect -33 64 33 80
rect -15 42 15 64
rect -15 -68 15 -42
<< polycont >>
rect -17 80 17 114
<< locali >>
rect -175 182 175 216
rect -175 182 -117 216
rect 79 182 175 216
rect -175 120 -141 182
rect 141 120 175 182
rect -33 80 -17 114
rect 17 80 33 114
rect -175 -182 -141 -120
rect -61 30 -27 46
rect -61 -46 -27 -30
rect -61 -182 -27 -30
rect 27 30 61 46
rect 27 -46 61 -30
rect -175 -182 -141 -120
rect 141 -182 175 -120
rect -175 -216 -79 -182
rect 79 -216 175 -182
<< viali >>
rect -17 80 17 114
rect -61 -30 -27 30
rect 27 -30 61 30
<< metal1 >>
rect -29 114 29 120
rect -29 80 -17 114
rect 17 80 29 114
rect -29 74 29 80
rect -67 30 -21 42
rect -67 -30 -61 30
rect -27 -30 -21 30

68
fullcustom/cad/inv/mag/sky130_fd_pr__pfet_01v8_MQX2PY.mag Normal file
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@ -0,0 +1,68 @@
magic
tech sky130A
magscale 1 2
timestamp 1681569004
<< nwell >>
rect -211 -303 211 303
<< pmos >>
rect -15 -84 15 84
<< pdiff >>
rect -73 72 -15 84
rect -73 -72 -61 72
rect -27 -72 -15 72
rect -73 -84 -15 -72
rect 15 72 73 84
rect 15 -72 27 72
rect 61 -72 73 72
rect 15 -84 73 -72
<< pdiffc >>
rect -61 -72 -27 72
rect 27 -72 61 72
<< nsubdiff >>
rect -175 233 -79 267
rect 79 233 175 267
rect -175 171 -141 233
rect 141 171 175 233
rect -175 -233 -141 -171
rect 141 -233 175 -171
rect -175 -267 -117 -233
rect 79 -267 175 -233
<< nsubdiffcont >>
rect -79 233 79 267
rect -175 -171 -141 171
rect 141 -171 175 171
<< poly >>
rect -15 84 15 115
rect -15 -115 15 -84
<< locali >>
rect -175 233 -79 267
rect 79 233 175 267
rect -175 171 -141 233
rect -67 84 -21 233
rect 141 171 175 233
rect -61 72 -27 84
rect -61 -88 -27 -72
rect 27 72 61 88
rect 27 -88 61 -72
rect -175 -233 -141 -171
rect 141 -233 175 -171
rect -175 -267 -117 -233
rect 79 -267 175 -233
<< viali >>
rect -61 -72 -27 72
rect 27 -72 61 72
<< metal1 >>
rect -67 72 -21 84
rect -67 -72 -61 72
rect -27 -72 -21 72
rect -67 -84 -21 -72
rect 21 72 67 84
rect 21 -72 27 72
rect 61 -72 67 72
rect 21 -84 67 -72
<< properties >>
string FIXED_BBOX -158 -250 158 250
string gencell sky130_fd_pr__pfet_01v8
string library sky130
string parameters w 0.84 l 0.15 m 1 nf 1 diffcov 100 polycov 100 guard 1 glc 1 grc 1 gtc 1 gbc 1 tbcov 100 rlcov 100 topc 1 botc 1 poverlap 0 doverlap 1 lmin 0.15 wmin 0.42 compatible {sky130_fd_pr__pfet_01v8 sky130_fd_pr__pfet_01v8_lvt sky130_fd_pr__pfet_01v8_hvt sky130_fd_pr__pfet_g5v0d10v5} full_metal 1 viasrc 100 viadrn 100 viagate 100 viagb 0 viagr 0 viagl 0 viagt 0
<< end >>

59
fullcustom/cad/inv/sch/inv.sch Normal file
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@ -0,0 +1,59 @@
v {xschem version=3.1.0 file_version=1.2
* Copyright 2021 Stefan Frederik Schippers
*
* Licensed under the Apache License, Version 2.0 (the "License");
* you may not use this file except in compliance with the License.
* You may obtain a copy of the License at
*
* https://www.apache.org/licenses/LICENSE-2.0
*
* Unless required by applicable law or agreed to in writing, software
* distributed under the License is distributed on an "AS IS" BASIS,
* WITHOUT WARRANTIES OR CONDITIONS OF ANY KIND, either express or implied.
* See the License for the specific language governing permissions and
* limitations under the License.
}
G {}
K {}
V {}
S {}
E {}
N 1990 -1040 1990 -980 {
lab=X}
N 1990 -950 2000 -950 {
lab=VSS}
N 2000 -950 2000 -920 {
lab=VSS}
N 1990 -920 2000 -920 {
lab=VSS}
N 1990 -1070 2000 -1070 {
lab=VDD}
N 2000 -1100 2000 -1070 {
lab=VDD}
N 1990 -1100 2000 -1100 {
lab=VDD}
N 1950 -1070 1950 -950 {
lab=A}
N 1990 -1130 1990 -1100 {
lab=VDD}
N 1990 -920 1990 -890 {
lab=VSS}
C {sky130_fd_pr/nfet_01v8.sym} 1970 -950 0 0 {name=n0
L=0.15
W=0.42
nf=1 mult=1
model=nfet_01v8
spiceprefix=X
}
C {sky130_fd_pr/pfet_01v8.sym} 1970 -1070 0 0 {name=p0
L=0.15
W=0.84
nf=1 mult=1
model=pfet_01v8
spiceprefix=X
}
C {devices/ipin.sym} 1950 -1010 0 0 {name=p1 lab=A}
C {devices/iopin.sym} 1990 -1130 0 0 {name=p2 lab=VDD}
C {devices/opin.sym} 1990 -1010 0 0 {name=p3 lab=X}
C {devices/iopin.sym} 1990 -890 0 0 {name=p9 lab=VSS}

0
fullcustom/cad/spice/.gitkeep → fullcustom/cad/inv/spice/.gitkeep
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0
fullcustom/cad/svg/.gitkeep → fullcustom/cad/inv/svg/.gitkeep
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27
fullcustom/cad/mag/inverter.mag
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@ -1,27 +0,0 @@
magic
tech sky130A
magscale 1 2
timestamp 1681238406
<< metal1 >>
rect 12 149 74 330
rect 112 -202 170 62
rect 12 -461 74 -280
rect 208 -364 271 233
use sky130_fd_pr__nfet_01v8_EDB9KC *sky130_fd_pr__nfet_01v8_EDB9KC_0
timestamp 1681237416
transform 1 0 141 0 1 -322
box -211 -252 211 252
use sky130_fd_pr__pfet_01v8_M479BZ sky130_fd_pr__pfet_01v8_M479BZ_0
timestamp 1681237537
transform 1 0 141 0 1 191
box -211 -261 211 261
<< labels >>
flabel metal1 12 149 74 330 0 FreeMono 160 90 0 0 VDD
port 1 nsew
flabel metal1 12 -461 74 -280 0 FreeMono 160 90 0 0 VSS
port 2 nsew
flabel metal1 112 -140 170 -34 0 FreeMono 160 0 0 0 I
port 3 nsew
flabel metal1 208 -140 271 -34 0 FreeMono 160 0 0 0 O
port 4 nsew
<< end >>

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fullcustom/cad/mag/sky130_fd_pr__pfet_01v8_M479BZ.mag
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@ -1,82 +0,0 @@
magic
tech sky130A
magscale 1 2
timestamp 1681237537
<< error_p >>
rect -29 -89 29 -83
rect -29 -123 -17 -89
rect -29 -129 29 -123
<< nwell >>
rect -211 -261 211 261
<< pmos >>
rect -15 -42 15 42
<< pdiff >>
rect -73 30 -15 42
rect -73 -30 -61 30
rect -27 -30 -15 30
rect -73 -42 -15 -30
rect 15 30 73 42
rect 15 -30 27 30
rect 61 -30 73 30
rect 15 -42 73 -30
<< pdiffc >>
rect -61 -30 -27 30
rect 27 -30 61 30
<< nsubdiff >>
rect -175 191 -79 225
rect 79 191 175 225
rect -175 129 -141 191
rect 141 129 175 191
rect -175 -191 -141 -129
rect 141 -191 175 -129
rect -175 -225 175 -191
<< nsubdiffcont >>
rect -79 191 79 225
rect -175 -129 -141 129
rect 141 -129 175 129
<< poly >>
rect -15 42 15 73
rect -15 -73 15 -42
rect -33 -89 33 -73
rect -33 -123 -17 -89
rect 17 -123 33 -89
rect -33 -139 33 -123
<< polycont >>
rect -17 -123 17 -89
<< locali >>
rect -175 191 -79 225
rect 79 191 175 225
rect -175 129 -141 191
rect 141 129 175 191
rect -61 30 -27 46
rect -61 -46 -27 -30
rect 27 30 61 46
rect 27 -46 61 -30
rect -33 -123 -17 -89
rect 17 -123 33 -89
rect -175 -191 -141 -129
rect 141 -191 175 -129
rect -175 -225 175 -191
<< viali >>
rect -61 -30 -27 30
rect 27 -30 61 30
rect -17 -123 17 -89
<< metal1 >>
rect -67 30 -21 42
rect -67 -30 -61 30
rect -27 -30 -21 30
rect -67 -42 -21 -30
rect 21 30 67 42
rect 21 -30 27 30
rect 61 -30 67 30
rect 21 -42 67 -30
rect -29 -89 29 -83
rect -29 -123 -17 -89
rect 17 -123 29 -89
rect -29 -129 29 -123
<< properties >>
string FIXED_BBOX -158 -208 158 208
string gencell sky130_fd_pr__pfet_01v8
string library sky130
string parameters w 0.42 l 0.15 m 1 nf 1 diffcov 100 polycov 100 guard 1 glc 1 grc 1 gtc 1 gbc 1 tbcov 100 rlcov 100 topc 1 botc 1 poverlap 0 doverlap 1 lmin 0.15 wmin 0.42 compatible {sky130_fd_pr__pfet_01v8 sky130_fd_pr__pfet_01v8_lvt sky130_fd_pr__pfet_01v8_hvt sky130_fd_pr__pfet_g5v0d10v5} full_metal 1 viasrc 100 viadrn 100 viagate 100 viagb 0 viagr 0 viagl 0 viagt 0
<< end >>

6
fullcustom/environment.yml
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@ -95,6 +95,7 @@ dependencies:
- nbformat=5.8.0=pyhd8ed1ab_0
- ncurses=6.3=h27087fc_1
- nest-asyncio=1.5.6=pyhd8ed1ab_0
- netgen=1.5.251_0_gd111fa0=20230412_103222
- ngspice-lib=38=h7017330_0
- notebook=6.5.4=pyha770c72_0
- notebook-shim=0.2.2=pyhd8ed1ab_0
@ -160,6 +161,7 @@ dependencies:
- xorg-renderproto=0.11.1=h7f98852_1002
- xorg-xextproto=7.3.0=h0b41bf4_1003
- xorg-xproto=7.0.31=h7f98852_1007
- xschem=3.1.0_525_gc71c15e9=20230412_103222
- xz=5.2.6=h166bdaf_0
- yaml=0.2.5=h7f98852_2
- zeromq=4.3.4=h9c3ff4c_1
@ -169,3 +171,7 @@ dependencies:
- pip:
- dataclasses-json==0.5.6
- gdstk==0.9.37
- marshmallow==3.19.0
- marshmallow-enum==1.5.1
- mypy-extensions==1.0.0
- typing-inspect==0.8.0

162
fullcustom/fullcustom-transistor.ipynb
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@ -8,7 +8,9 @@
"source": [
"# Fullcustom analog design demo using Magic\n",
"\n",
"The environment path must be retrieved in order to provide _Magic_ with the technology files:"
"The environment path must be retrieved in order to provide _Magic_ with the technology files.\n",
"\n",
"**Please check them. If they are wrong, you can hardcode the correct ones. If you don't know, let it as it is and check for strange behaviours afterwards 😉**"
]
},
{
@ -20,7 +22,14 @@
"outputs": [],
"source": [
"import os\n",
"CONDA_PREFIX = os.environ['CONDA_PREFIX']"
"from pathlib import Path\n",
"CONDA_DIR = os.environ['CONDA_PREFIX']\n",
"HOME_DIR = Path.home()\n",
"FULLCUSTOM_DIR = os.path.abspath(\"\")\n",
"\n",
"print(f\"Anaconda environment absolute path = '{CONDA_DIR}'\")\n",
"print(f\"Home directory absolute path = '{HOME_DIR}'\")\n",
"print(f\"Fullcustom absolute path = '{FULLCUSTOM_DIR}'\")"
]
},
{
@ -49,18 +58,18 @@
},
"outputs": [],
"source": [
"%%script magic -dnull -noconsole -rcfile {CONDA_PREFIX}/share/pdk/sky130A/libs.tech/magic/sky130A.magicrc\n",
"%%script magic -dnull -noconsole -rcfile {CONDA_DIR}/share/pdk/sky130A/libs.tech/magic/sky130A.magicrc\n",
"\n",
"load cad/mag/inverter.mag\n",
"load cad/inv/mag/inv.mag\n",
"\n",
"extract\n",
"extract all\n",
"ext2spice lvs\n",
"ext2spice cthresh 0\n",
"ext2spice rthresh 0\n",
"ext2spice -o cad/spice/inverter.spice\n",
"#ext2spice cthresh 0\n",
"#ext2spice rthresh 0\n",
"ext2spice -o cad/inv/spice/inv.spice\n",
"\n",
"gds labels no\n",
"gds write cad/gds/inverter.gds"
"gds write cad/inv/gds/inv.gds"
]
},
{
@ -88,10 +97,10 @@
"import gdstk\n",
"import IPython.display\n",
"\n",
"library = gdstk.read_gds('cad/gds/inverter.gds')\n",
"library = gdstk.read_gds('cad/inv/gds/inv.gds')\n",
"top_cells = library.top_level()\n",
"top_cells[0].write_svg('cad/svg/inverter.svg', scaling=100)\n",
"IPython.display.SVG('cad/svg/inverter.svg')"
"top_cells[0].write_svg('cad/inv/svg/inv.svg', scaling=100)\n",
"IPython.display.SVG('cad/inv/svg/inv.svg')"
]
},
{
@ -102,7 +111,7 @@
"\n",
"### Using _SPICE_ simulation engine\n",
"\n",
"[_PySPICE_](https://pyspice.fabrice-salvaire.fr/releases/v1.4/overview.html) is a _Python_ implementation of several _SPICE_ simulation engines. The _SPICE_ engines are used to simulate analog circuits. A top-level test bench circuit must be built:"
"[_PySPICE_](https://pyspice.fabrice-salvaire.fr/releases/v1.4/overview.html) is a _Python_ interface for several _SPICE_ simulation engines. The _SPICE_ engines are used to simulate analog circuits. A top-level test bench circuit must be built:"
]
},
{
@ -122,28 +131,28 @@
"from PySpice.Unit import *\n",
"\n",
"# Declare the top-level circuit\n",
"circuit = Circuit('Inverter')\n",
"circuit = Circuit('INV')\n",
"# Link to technology libraries\n",
"circuit.lib(f'{CONDA_PREFIX}/share/pdk/sky130A/libs.tech/ngspice/sky130.lib.spice', 'tt')\n",
"circuit.lib(f'{CONDA_DIR}/share/pdk/sky130A/libs.tech/ngspice/sky130.lib.spice', 'tt')\n",
"\n",
"# Import and instantiate the CUT (Circuit Under Test)\n",
"circuit.include('cad/spice/inverter.spice')\n",
"circuit.X('Inverter', 'inverter', 'VDD','VSS','I','O');\n",
"circuit.include('cad/inv/spice/inv.spice')\n",
"circuit.X('INV', 'inv', 'VDD','VSS','A','X');\n",
"circuit.C('','X','VSS','10f')\n",
"\n",
"# Add voltage sources\n",
"circuit.V('VSS', 'VSS', 0, 0)\n",
"circuit.V('VDD', 'VDD', 'VSS', 1.8)\n",
"# Add pulse source\n",
"circuit.PulseVoltageSource(\n",
" 'I', 'I', 'VSS',\n",
"circuit.V('V_SS', 'VSS', 0, 0)\n",
"circuit.V('V_DD', 'VDD', 'VSS', 1.8)\n",
"\n",
"# Add pulse sources\n",
"circuit.PulseVoltageSource('A', 'A', 0,\n",
" initial_value=0@u_V, pulsed_value=1.8@u_V,\n",
" rise_time=10@u_ps, fall_time=10@u_ps,\n",
" pulse_width=40@u_ps, period=160@u_ps, delay_time=10@u_ps\n",
")\n",
" pulse_width=0.35@u_ns, period=0.8@u_ns, delay_time=0.2@u_ns)\n",
"\n",
"# Create the simulation and simulate\n",
"simulator = circuit.simulator()\n",
"analysis = simulator.transient(step_time=1@u_ps, end_time=160@u_ps)"
"analysis = simulator.transient(step_time=10@u_ps, end_time=1@u_ns)"
]
},
{
@ -170,14 +179,14 @@
"ax.grid(visible=True, which='minor', axis='both', linestyle=\"--\");\n",
"ax.set_yticks(np.linspace(-1.0,2.5,8,endpoint=True));\n",
"ax.set_yticks(np.linspace(-1.0,2.5,36,endpoint=True),minor=True);\n",
"ax.set_xticks(np.linspace(0e-12,160e-12,9,endpoint=True));\n",
"ax.set_xticks(np.linspace(0e-12,160e-12,17,endpoint=True),minor=True);\n",
"ax.set_title('Inverter - Transient Simulation')\n",
"ax.set_xticks(np.linspace(0e-12,1e-9,11,endpoint=True));\n",
"ax.set_xticks(np.linspace(0e-12,1e-9,21,endpoint=True),minor=True);\n",
"ax.set_title('INV Gate - Transient Simulation')\n",
"ax.set_xlabel('Time [s]')\n",
"ax.set_ylabel('Signal [V]')\n",
"ax.plot(analysis.time,analysis.I)\n",
"ax.plot(analysis.time,analysis.O)\n",
"ax.legend(('Input (I)', 'Output (O)'))\n",
"ax.plot(analysis.time,analysis.A)\n",
"ax.plot(analysis.time,analysis.X)\n",
"ax.legend(('Input (A)', 'Output (X)'))\n",
"plt.tight_layout()\n",
"plt.show()"
]
@ -186,6 +195,8 @@
"cell_type": "markdown",
"metadata": {},
"source": [
"# To have fun going further...\n",
"\n",
"## Graphical editor\n",
"\n",
"_Magic_ can be started specifying only one file (`.magicrc`) that sets everything up (layers, macros, DRC rules, etc.)! Both a console and a GUI are started. Some functions are only accessible using the command-line interface or using keybindings."
@ -197,24 +208,103 @@
"metadata": {},
"outputs": [],
"source": [
"!magic -rcfile {CONDA_PREFIX}/share/pdk/sky130A/libs.tech/magic/sky130A.magicrc"
"!magic -rcfile {CONDA_DIR}/share/pdk/sky130A/libs.tech/magic/sky130A.magicrc"
]
},
{
"cell_type": "markdown",
"metadata": {},
"source": [
"# To have fun going further...\n",
"## Schematic editor\n",
"\n",
"Of course, the workflow would not be complete without a schematic editor... and an LVS tool. For instance, one can use _Xscheme_:"
]
},
{
"cell_type": "code",
"execution_count": null,
"metadata": {},
"outputs": [],
"source": [
"!export PDK_ROOT={CONDA_DIR}/share/pdk/; \\\n",
"xschem --rcfile {CONDA_DIR}/share/pdk/sky130A/libs.tech/xschem/xschemrc"
]
},
{
"cell_type": "markdown",
"metadata": {},
"source": [
"The inverter schematic is available under:\n",
" \n",
"```\n",
"fullcustom/cad/inv/sch/inv.sch\n",
"```\n",
"\n",
"Open it with _xschem_ and generate the netlist by:\n",
"\n",
" * Selecting _Spice netlist_ in the _Options_ toolbar menu. (This will produce a netlist in a format accepted by the _LVS_ tool.)\n",
" * Selecting _LVS netlist: Top level is a .subckt_ in the _Simulation_ toolbar menu. (This will encapsulate the circuit in a subcircuit. The _LVS_ tool fails otherwose.)\n",
" \n",
"Click on _Netlist_ (top right) to generate the netlist. It is generated by default under the user repository:\n",
"\n",
"```\n",
"~/.xschem/simulations/<circuit>.spice\n",
"```\n",
"\n",
"This location is assumed in the following cells."
]
},
{
"cell_type": "markdown",
"metadata": {},
"source": [
"## Layout Versus Schematic\n",
"\n",
"The layout netlists takes into account the parasitics. They are modeled as lumped resistances and capacitances but they are reported on the schematic. They must be therefore removed from the schematic's netlist. Comment out the two following lines of the corresponding cell above:\n",
"\n",
"```diff\n",
"- ext2spice cthresh 0\n",
"- ext2spice rthresh 0\n",
"+ #ext2spice cthresh 0\n",
"+ #ext2spice rthresh 0\n",
"```\n",
"\n",
"Now that both the schematic's and the layout's netlists are written, they can be compare by _netgen_, the LVS tool:"
]
},
{
"cell_type": "code",
"execution_count": null,
"metadata": {},
"outputs": [],
"source": [
"!netgen lvs \\\n",
"\"{FULLCUSTOM_DIR}/cad/inv/spice/inv.spice inv\" \\\n",
"\"{HOME_DIR}/.xschem/simulations/inv.spice inv\" \\\n",
"\"{CONDA_DIR}/share/pdk/sky130A/libs.tech/netgen/setup.tcl\""
]
},
{
"cell_type": "markdown",
"metadata": {},
"source": [
"## Some ideas...\n",
"\n",
"Here are a couple ideas to spend a good time exploring those beautiful pieces of software:\n",
"\n",
" * Characterize an NMOS device or a PMOS device by applying voltage pulses on the different pads.\n",
" * Start _Magic_ on another PDK and design another inverter.\n",
" * Vary the devices' geometry; try to make the pull-up and the pull-down waveforms symmetrical.\n",
" * Start _Magic_ on another PDK and design an inverter.\n",
" * Vary the devices' geometry and compare the pull-down and pull-up curves.\n",
" * Copy this notebook to explore the NAND gate cell available in the repository.\n",
" \n",
" **Do not hesitate to open the `.mag` files to see how they are built and to adapt from them!**\n",
" \n",
" > Good luck and read the docs. 😉"
" > Good luck and read the docs. 😉\n",
" \n",
"## More food for the brain\n",
"\n",
" * http://opencircuitdesign.com/\n",
" * https://skywater-pdk.readthedocs.io"
]
},
{

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<svg xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink" version="1.1" id="metal_stack" width="100%" height="100%" viewBox="-6 -6 1857 1665">
<desc>
XCircuit Version 3.10
File "metal_stack.ps" Page 1
</desc>
<g stroke="black">
<path d="M819,555 L819,539 955,539 955,555 z" fill="#cbf3f3" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cbf3f3"/>
<path d="M827,747 L827,715 923,715 923,747 z" fill="#cccccc" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cccccc"/>
<path d="M835,539 L835,491 931,491 931,539 z" fill="#cccccc" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cccccc"/>
<path d="M755,1371 L755,1323 851,1323 851,1371 z" fill="#cccccc" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cccccc"/>
<path d="M1075,1291 L1075,1211 1171,1211 1171,1291 z" fill="#cccccc" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cccccc"/>
<path d="M1075,1131 L1075,1067 1171,1067 1171,1131 z" fill="#cccccc" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cccccc"/>
<path d="M1075,987 L1075,923 1171,923 1171,987 z" fill="#cccccc" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cccccc"/>
<path d="M1075,779 L1075,715 1171,715 1171,779 z" fill="#cccccc" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cccccc"/>
<path d="M1075,571 L1075,491 1235,491 1235,571 z" fill="#cccccc" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cccccc"/>
<path d="M1075,1483 L1075,1323 1171,1323 1171,1483 z" fill="#cccccc" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cccccc"/>
<path d="M483,1483 L483,1547 C483,1565 497,1579 515,1579 L1491,1579 C1509,1579 1523,1565 1523,1547 L1523,1483 " fill="#fbfec3" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#fbfec3"/>
<path d="M931,1483 L931,1499 C931,1517 945,1531 963,1531 L1443,1531 C1461,1531 1475,1517 1475,1499 L1475,1483 " fill="#faca8a" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#faca8a"/>
<path d="M723,1435 L723,1371 883,1371 883,1435 z" fill="#ffc0cb" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#ffc0cb"/>
<path d="M1235,1467 L1235,1403 1443,1403 1443,1467 z" fill="#ffc0cb" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#ffc0cb"/>
<path d="M643,1323 L643,1291 1555,1291 1555,1323 z" fill="#cffecf" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cffecf"/>
<path d="M643,1211 L643,1131 1587,1131 1587,1211 z" fill="#cbf3f3" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cbf3f3"/>
<path d="M643,1067 L643,987 1587,987 1587,1067 z" fill="#cbf3f3" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cbf3f3"/>
<path d="M643,923 L643,779 1619,779 1619,923 z" fill="#cbf3f3" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cbf3f3"/>
<path d="M643,715 L643,571 1619,571 1619,715 z" fill="#cbf3f3" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cbf3f3"/>
<path d="M659,491 L659,283 1571,283 1571,491 z" fill="#cbf3f3" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cbf3f3"/>
<g transform="matrix( 1 0 -0 1 950 27)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="0">(Diagram not to scale!)</tspan>
</text></g>
<path d="M443,1483 L1619,1483 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M931,1483 L931,1499 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1475,1483 L1475,1499 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M931,1499 A32,32 0 0,0 963,1531 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M963,1531 L1443,1531 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1443,1531 A32,32 0 0,0 1475,1499 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M483,1483 L483,1547 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1523,1483 L1523,1547 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M515,1579 L1491,1579 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M483,1547 A32,32 0 0,0 515,1579 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1491,1579 A32,32 0 0,0 1523,1547 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1075 1515)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="0">diffusion</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 819 1531)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="0">nwell</tspan>
</text></g>
<path d="M1235,1467 L1235,1403 1443,1403 1443,1467 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1347 1435)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-89" y="-6">polysilicon</tspan><tspan x="-33" y="34">gate</tspan>
</text></g>
<path d="M1075,1483 L1075,1323 1171,1323 1171,1483 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1123 1411)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-40" y="14">licon</tspan>
</text></g>
<path d="M643,1323 L643,1291 1555,1291 1555,1323 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1123 1307)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-11" y="14">li</tspan>
</text></g>
<path d="M643,1211 L643,1131 1587,1131 1587,1211 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1123 1179)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-55" y="0">metal1</tspan>
</text></g>
<path d="M643,1067 L643,987 1587,987 1587,1067 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1123 1035)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-55" y="0">metal2</tspan>
</text></g>
<path d="M643,923 L643,779 1619,779 1619,923 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1123 859)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-55" y="0">metal3</tspan>
</text></g>
<path d="M643,715 L643,571 1619,571 1619,715 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1123 651)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-55" y="0">metal4</tspan>
</text></g>
<path d="M659,491 L659,283 1571,283 1571,491 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1123 395)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-55" y="0">metal5</tspan>
</text></g>
<path d="M1075,1291 L1075,1211 1171,1211 1171,1291 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1123 1259)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-45" y="9">mcon</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 803 1355)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-40" y="0">licon</tspan>
</text></g>
<path d="M1075,1131 L1075,1067 1171,1067 1171,1131 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1075,987 L1075,923 1171,923 1171,987 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1075,779 L1075,715 1171,715 1171,779 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1075,571 L1075,491 1235,491 1235,571 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1123 1099)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-35" y="14">via1</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 1123 955)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-35" y="14">via2</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 1123 747)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-35" y="14">via3</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 1155 539)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-35" y="14">via4</tspan>
</text></g>
<path d="M739,187 L739,139 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1523,187 L1523,139 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1555,107 L1795,107 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M707,107 L227,107 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M739,139 A32,32 0 0,0 707,107 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1555,107 A32,32 0 0,0 1523,139 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1155 155)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-70" y="0">glass cut</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 475 339)" fill="#0000ff">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-94" y="0">PI1 K=2.94</tspan>
</text></g>
<path d="M1715,1483 L1827,1483 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1539,1531 L1827,1531 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1803,1559 C1798,1549 1798,1546 1795,1531 C1792,1546 1792,1549 1787,1559 C1793,1557 1797,1557 1803,1559 " fill="#000000" stroke="none"/>
<path d="M1803,1455 C1798,1465 1798,1468 1795,1483 C1792,1468 1792,1465 1787,1455 C1793,1457 1797,1457 1803,1455 " fill="#000000" stroke="none"/>
<g transform="matrix( 0.7 0 -0 0.7 1795 1515)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-63" y="0">0.12<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="22" y="0">µm</tspan></text>
</text></g>
<path d="M1507,1467 L1747,1467 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1507,1403 L1747,1403 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1683,1403 L1683,1355 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1683,1467 L1683,1515 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1691,1495 C1686,1485 1686,1482 1683,1467 C1680,1482 1680,1485 1675,1495 C1681,1493 1685,1493 1691,1495 " fill="#000000" stroke="none"/>
<path d="M1691,1375 C1686,1385 1686,1388 1683,1403 C1680,1388 1680,1385 1675,1375 C1681,1377 1685,1377 1691,1375 " fill="#000000" stroke="none"/>
<g transform="matrix( 0.7 0 -0 0.7 1715 1435)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-63" y="14">0.18<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="20" y="14">µm</tspan></text>
</text></g>
<path d="M1635,1323 L1731,1323 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1563,1291 L1731,1291 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1715,1291 L1715,1243 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1715,1323 L1715,1371 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1723,1351 C1718,1341 1718,1338 1715,1323 C1712,1338 1712,1341 1707,1351 C1713,1349 1717,1349 1723,1351 " fill="#000000" stroke="none"/>
<path d="M1723,1263 C1718,1273 1718,1276 1715,1291 C1712,1276 1712,1273 1707,1263 C1713,1265 1717,1265 1723,1263 " fill="#000000" stroke="none"/>
<g transform="matrix( 0.7 0 -0 0.7 1747 1307)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="14">0.1<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="59" y="14">µm</tspan></text>
</text></g>
<path d="M1635,1211 L1731,1211 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1635,1131 L1731,1131 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1723,1159 C1718,1149 1718,1146 1715,1131 C1712,1146 1712,1149 1707,1159 C1713,1157 1717,1157 1723,1159 " fill="#000000" stroke="none"/>
<path d="M1723,1183 C1718,1193 1718,1196 1715,1211 C1712,1196 1712,1193 1707,1183 C1713,1185 1717,1185 1723,1183 " fill="#000000" stroke="none"/>
<path d="M1715,1211 L1715,1131 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1747 1179)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="0">0.36</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="80" y="0"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<path d="M1635,1067 L1731,1067 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1635,987 L1731,987 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1723,1015 C1718,1005 1718,1002 1715,987 C1712,1002 1712,1005 1707,1015 C1713,1013 1717,1013 1723,1015 " fill="#000000" stroke="none"/>
<path d="M1723,1039 C1718,1049 1718,1052 1715,1067 C1712,1052 1712,1049 1707,1039 C1713,1041 1717,1041 1723,1039 " fill="#000000" stroke="none"/>
<path d="M1715,1067 L1715,987 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1747 1035)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="0">0.36</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="80" y="0"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<path d="M1635,923 L1731,923 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1635,779 L1731,779 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1723,807 C1718,797 1718,794 1715,779 C1712,794 1712,797 1707,807 C1713,805 1717,805 1723,807 " fill="#000000" stroke="none"/>
<path d="M1723,895 C1718,905 1718,908 1715,923 C1712,908 1712,905 1707,895 C1713,897 1717,897 1723,895 " fill="#000000" stroke="none"/>
<path d="M1715,923 L1715,779 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1747 859)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="0">0.845</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="104" y="0"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<path d="M1635,715 L1731,715 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1635,571 L1731,571 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1723,599 C1718,589 1718,586 1715,571 C1712,586 1712,589 1707,599 C1713,597 1717,597 1723,599 " fill="#000000" stroke="none"/>
<path d="M1723,687 C1718,697 1718,700 1715,715 C1712,700 1712,697 1707,687 C1713,689 1717,689 1723,687 " fill="#000000" stroke="none"/>
<path d="M1715,715 L1715,571 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1747 651)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="0">0.845</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="104" y="0"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<path d="M1635,491 L1731,491 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1635,283 L1747,283 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1691,311 C1686,301 1686,298 1683,283 C1680,298 1680,301 1675,311 C1681,309 1685,309 1691,311 " fill="#000000" stroke="none"/>
<path d="M1691,463 C1686,473 1686,476 1683,491 C1680,476 1680,473 1675,463 C1681,465 1685,465 1691,463 " fill="#000000" stroke="none"/>
<path d="M1683,491 L1683,283 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1715 395)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="0">1.26</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="76" y="0"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<path d="M1795,1483 L1795,1419 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1795,1531 L1795,1595 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M723,1435 L723,1371 883,1371 883,1435 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 803 1403)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-77" y="14">field poly</tspan>
</text></g>
<path d="M427,1483 L51,1483 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M387,1435 L299,1435 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M371,1483 L371,1547 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M379,1511 C374,1501 374,1498 371,1483 C368,1498 368,1501 363,1511 C369,1509 373,1509 379,1511 " fill="#000000" stroke="none"/>
<path d="M371,1435 L371,1387 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M379,1407 C374,1417 374,1420 371,1435 C368,1420 368,1417 363,1407 C369,1409 373,1409 379,1407 " fill="#000000" stroke="none"/>
<path d="M355,1323 L251,1323 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M275,1483 L275,1419 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M283,1351 C278,1341 278,1338 275,1323 C272,1338 272,1341 267,1351 C273,1349 277,1349 283,1351 " fill="#000000" stroke="none"/>
<path d="M283,1455 C278,1465 278,1468 275,1483 C272,1468 272,1465 267,1455 C273,1457 277,1457 283,1455 " fill="#000000" stroke="none"/>
<g transform="matrix( 0.7 0 -0 0.7 363 1467)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-83" y="0">0.3262<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="56" y="0">µm</tspan></text>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 347 1403)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-166" y="14">0.9361<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="-43" y="14">µm</tspan></text>
</text></g>
<path d="M355,1211 L139,1211 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M275,1387 L275,1323 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M147,1483 L147,1291 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M147,1251 L147,1211 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M155,1455 C150,1465 150,1468 147,1483 C144,1468 144,1465 139,1455 C145,1457 149,1457 155,1455 " fill="#000000" stroke="none"/>
<path d="M155,1239 C150,1229 150,1226 147,1211 C144,1226 144,1229 139,1239 C145,1237 149,1237 155,1239 " fill="#000000" stroke="none"/>
<g transform="matrix( 0.7 0 -0 0.7 195 1283)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-83" y="0">1.3761</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="25" y="0"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<path d="M355,1067 L123,1067 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M131,1115 L131,1067 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M139,1095 C134,1085 134,1082 131,1067 C128,1082 128,1085 123,1095 C129,1093 133,1093 139,1095 " fill="#000000" stroke="none"/>
<g transform="matrix( 0.7 0 -0 0.7 187 1147)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-83" y="0">2.0061</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="45" y="0"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<path d="M355,923 L107,923 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M115,971 L115,923 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M123,951 C118,941 118,938 115,923 C112,938 112,941 107,951 C113,949 117,949 123,951 " fill="#000000" stroke="none"/>
<g transform="matrix( 0.7 0 -0 0.7 171 1003)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-83" y="0">2.7861<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="46" y="0">µm</tspan></text>
</text></g>
<path d="M355,715 L91,715 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M99,779 L99,715 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M107,743 C102,733 102,730 99,715 C96,730 96,733 91,743 C97,741 101,741 107,743 " fill="#000000" stroke="none"/>
<g transform="matrix( 0.7 0 -0 0.7 155 811)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-83" y="0">4.0211<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="40" y="0">µm</tspan></text>
</text></g>
<path d="M299,491 L75,491 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M83,571 L83,491 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M91,519 C86,509 86,506 83,491 C80,506 80,509 75,519 C81,517 85,517 91,519 " fill="#000000" stroke="none"/>
<g transform="matrix( 0.7 0 -0 0.7 139 603)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-83" y="0">5.3711<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="30" y="0">µm</tspan></text>
</text></g>
<path d="M211,107 L35,107 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cccccc"/>
<path d="M67,219 L67,107 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M75,135 C70,125 70,122 67,107 C64,122 64,125 59,135 C65,133 69,133 75,135 " fill="#000000" stroke="none"/>
<g transform="matrix( 0.7 0 -0 0.7 107 251)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-93" y="0">11.8834<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="46" y="0">µm</tspan></text>
</text></g>
<path d="M403,1435 L675,1435 " fill="none" style="stroke-dasharray:4,4" stroke-width="2" stroke-linecap="butt" stroke-linejoin="bevel" stroke="#999999"/>
<g transform="matrix( 0.7 0 -0 0.7 587 1467)" fill="#0000ff">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-191" y="0">FOX K=3.9</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 1571 1563)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="0">p-substrate</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 523 1379)" fill="#0000ff">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-185" y="14">PSG K=3.9</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 1531 1275)" fill="#0000ff">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-202" y="14">LINT K=7.3</tspan>
</text></g>
<path d="M643,1323 L363,1323 " fill="none" style="stroke-dasharray:4,4" stroke-width="2" stroke-linecap="butt" stroke-linejoin="bevel" stroke="#999999"/>
<g transform="matrix( 0.7 0 -0 0.7 547 1251)" fill="#0000ff">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-246" y="14">NILD2 K=4.05</tspan>
</text></g>
<path d="M371,1211 L643,1211 " fill="none" style="stroke-dasharray:4,4" stroke-width="2" stroke-linecap="butt" stroke-linejoin="bevel" stroke="#999999"/>
<path d="M371,1067 L643,1067 " fill="none" style="stroke-dasharray:4,4" stroke-width="2" stroke-linecap="butt" stroke-linejoin="bevel" stroke="#999999"/>
<path d="M371,923 L643,923 " fill="none" style="stroke-dasharray:4,4" stroke-width="2" stroke-linecap="butt" stroke-linejoin="bevel" stroke="#999999"/>
<path d="M371,715 L643,715 " fill="none" style="stroke-dasharray:4,4" stroke-width="2" stroke-linecap="butt" stroke-linejoin="bevel" stroke="#999999"/>
<path d="M315,491 L635,491 " fill="none" style="stroke-dasharray:4,4" stroke-width="2" stroke-linecap="butt" stroke-linejoin="bevel" stroke="#999999"/>
<g transform="matrix( 0.7 0 -0 0.7 1563 1115)" fill="#0000ff">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-273" y="0">NILD3_C K=3.5</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 547 1011)" fill="#0000ff">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-226" y="0">NILD4 K=4.2</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 547 835)" fill="#0000ff">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-226" y="0">NILD5 K=4.1</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 547 627)" fill="#0000ff">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-226" y="0">NILD6 K=4.0</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 547 1155)" fill="#0000ff">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-226" y="0">NILD3 K=4.5</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 1563 971)" fill="#0000ff">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-273" y="0">NILD4_C K=3.5</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 1427 251)" fill="#0000ff">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-244" y="0">TOPOX K=3.9</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 35 1483)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-50" y="14">0.0</tspan>
</text></g>
<path d="M691,1259 L691,1307 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M699,1287 C694,1277 694,1274 691,1259 C688,1274 688,1277 683,1287 C689,1285 693,1285 699,1287 " fill="#000000" stroke="none"/>
<path d="M699,1183 C694,1193 694,1196 691,1211 C688,1196 688,1193 683,1183 C689,1185 693,1185 699,1183 " fill="#000000" stroke="none"/>
<path d="M683,1095 C678,1085 678,1082 675,1067 C672,1082 672,1085 667,1095 C673,1093 677,1093 683,1095 " fill="#000000" stroke="none"/>
<path d="M683,1103 C678,1113 678,1116 675,1131 C672,1116 672,1113 667,1103 C673,1105 677,1105 683,1103 " fill="#000000" stroke="none"/>
<path d="M675,1067 L675,1131 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M683,951 C678,941 678,938 675,923 C672,938 672,941 667,951 C673,949 677,949 683,951 " fill="#000000" stroke="none"/>
<path d="M683,959 C678,969 678,972 675,987 C672,972 672,969 667,959 C673,961 677,961 683,959 " fill="#000000" stroke="none"/>
<path d="M675,923 L675,987 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M683,743 C678,733 678,730 675,715 C672,730 672,733 667,743 C673,741 677,741 683,743 " fill="#000000" stroke="none"/>
<path d="M683,751 C678,761 678,764 675,779 C672,764 672,761 667,751 C673,753 677,753 683,751 " fill="#000000" stroke="none"/>
<path d="M675,715 L675,779 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M683,519 C678,509 678,506 675,491 C672,506 672,509 667,519 C673,517 677,517 683,519 " fill="#000000" stroke="none"/>
<path d="M683,543 C678,553 678,556 675,571 C672,556 672,553 667,543 C673,545 677,545 683,543 " fill="#000000" stroke="none"/>
<path d="M675,491 L675,571 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M939,135 C934,125 934,122 931,107 C928,122 928,125 923,135 C929,133 933,133 939,135 " fill="#000000" stroke="none"/>
<path d="M939,255 C934,265 934,268 931,283 C928,268 928,265 923,255 C929,257 933,257 939,255 " fill="#000000" stroke="none"/>
<path d="M931,107 L931,283 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M739,107 L963,107 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<g transform="matrix( 0.7 0 -0 0.7 651 1235)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="14">0.265</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="108" y="14"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<path d="M755,1371 L755,1323 851,1323 851,1371 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 691 1099)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="14">0.27</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="84" y="14"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 691 955)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="14">0.42</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="84" y="14"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 691 747)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="14">0.39</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="76" y="14"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 691 531)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="14">0.505</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="106" y="14"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 947 211)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="14">5.2523</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="126" y="14"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 1395 1347)" fill="#0000ff">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-182" y="14">IOX K=3.9</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 1427 1387)" fill="#0000ff">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-222" y="14">SPNIT K=7.5</tspan>
</text></g>
<path d="M1443,1467 L1443,1403 1459,1403 1459,1467 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1459,1467 L1491,1467 1491,1371 1187,1371 1187,1467 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1587,1211 L1587,1131 1619,1131 1619,1211 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1587,1067 L1587,987 1619,987 1619,1067 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M883,1435 L883,1371 899,1371 899,1435 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M899,1435 L931,1435 931,1339 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M723,1435 L707,1435 707,1371 723,1371 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M707,1435 L675,1435 675,1339 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M675,1339 L755,1339 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M931,1339 L851,1339 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1187,1467 L1219,1467 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1219,1467 L1219,1403 1235,1403 1235,1467 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1507,1371 L1635,1371 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<g transform="matrix( 0.7 0 -0 0.7 1523 1387)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="14">0.121<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="101" y="14">µm</tspan></text>
</text></g>
<path d="M1571,955 L1587,955 1603,1003 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1571,1107 L1587,1107 1603,1155 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1451,1411 L1435,1347 1403,1347 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1547,1431 C1542,1421 1542,1418 1539,1403 C1536,1418 1536,1421 1531,1431 C1537,1429 1541,1429 1547,1431 " fill="#000000" stroke="none"/>
<path d="M1539,1403 L1539,1443 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1547,1343 C1542,1353 1542,1356 1539,1371 C1536,1356 1536,1353 1531,1343 C1537,1345 1541,1345 1547,1343 " fill="#000000" stroke="none"/>
<path d="M1539,1371 L1539,1331 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M931,1435 L1075,1435 " fill="none" style="stroke-dasharray:4,4" stroke-width="2" stroke-linecap="butt" stroke-linejoin="bevel" stroke="#999999"/>
<g transform="matrix( 0.7 0 -0 0.7 1059 1387)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-166" y="14">0.6099<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="-33" y="14">µm</tspan></text>
</text></g>
<path d="M995,1371 L995,1323 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M995,1403 L995,1435 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1003,1407 C998,1417 998,1420 995,1435 C992,1420 992,1417 987,1407 C993,1409 997,1409 1003,1407 " fill="#000000" stroke="none"/>
<path d="M1003,1351 C998,1341 998,1338 995,1323 C992,1338 992,1341 987,1351 C993,1349 997,1349 1003,1351 " fill="#000000" stroke="none"/>
<path d="M1587,1299 L1587,1259 1171,1259 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M979,1259 L915,1259 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M955,1231 C950,1241 950,1244 947,1259 C944,1244 944,1241 939,1231 C945,1233 949,1233 955,1231 " fill="#000000" stroke="none"/>
<path d="M955,1319 C950,1309 950,1306 947,1291 C944,1306 944,1309 939,1319 C945,1317 949,1317 955,1319 " fill="#000000" stroke="none"/>
<path d="M947,1291 L947,1339 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M947,1259 L947,1219 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 947 1275)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-73" y="14">0.075</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="33" y="14"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<path d="M1587,1299 L1619,1299 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1619,1323 L1555,1323 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M579,1291 L611,1291 611,1259 1075,1259 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M571,1291 L363,1291 " fill="none" style="stroke-dasharray:4,4" stroke-width="2" stroke-linecap="butt" stroke-linejoin="bevel" stroke="#999999"/>
<g transform="matrix( 0.7 0 -0 0.7 523 1307)" fill="#0000ff">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-202" y="14">LINT K=7.3</tspan>
</text></g>
<path d="M355,1291 L203,1291 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M219,1339 L219,1291 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M227,1319 C222,1309 222,1306 219,1291 C216,1306 216,1309 211,1319 C217,1317 221,1317 227,1319 " fill="#000000" stroke="none"/>
<path d="M227,1455 C222,1465 222,1468 219,1483 C216,1468 216,1465 211,1455 C217,1457 221,1457 227,1455 " fill="#000000" stroke="none"/>
<path d="M219,1483 L219,1379 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 267 1355)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-166" y="14">1.0111<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="-59" y="14">µm</tspan></text>
</text></g>
<path d="M691,1211 L691,1163 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M755,283 L755,259 643,259 643,491 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1475,283 L1475,259 1587,259 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1587,259 L1587,491 1571,491 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1635,259 L1747,259 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1739,323 L1739,283 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1739,259 L1739,179 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1747,311 C1742,301 1742,298 1739,283 C1736,298 1736,301 1731,311 C1737,309 1741,309 1747,311 " fill="#000000" stroke="none"/>
<path d="M1747,231 C1742,241 1742,244 1739,259 C1736,244 1736,241 1731,231 C1737,233 1741,233 1747,231 " fill="#000000" stroke="none"/>
<g transform="matrix( 0.7 0 -0 0.7 1763 283)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="0">0.09</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="82" y="0"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<path d="M1435,243 L1467,243 1491,275 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<g transform="matrix( 0.7 0 -0 0.7 579 475)" fill="#0000ff">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-253" y="0">TOPNIT K=7.5</tspan>
</text></g>
<path d="M571,443 L611,443 611,187 755,187 755,259 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1475,259 L1475,187 1611,187 1611,435 1619,435 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1587,491 L1619,491 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M571,443 L291,443 " fill="none" style="stroke-dasharray:4,4" stroke-width="2" stroke-linecap="butt" stroke-linejoin="bevel" stroke="#999999"/>
<path d="M299,491 L299,563 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M299,443 L299,379 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M307,415 C302,425 302,428 299,443 C296,428 296,425 291,415 C297,417 301,417 307,415 " fill="#000000" stroke="none"/>
<path d="M307,519 C302,509 302,506 299,491 C296,506 296,509 291,519 C297,517 301,517 307,519 " fill="#000000" stroke="none"/>
<path d="M643,491 L659,491 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M771,187 L859,187 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M763,259 L859,259 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M795,259 L795,187 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M803,215 C798,205 798,202 795,187 C792,202 792,205 787,215 C793,213 797,213 803,215 " fill="#000000" stroke="none"/>
<path d="M803,231 C798,241 798,244 795,259 C792,244 792,241 787,231 C793,233 797,233 803,231 " fill="#000000" stroke="none"/>
<g transform="matrix( 0.7 0 -0 0.7 811 227)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="14">0.54</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="80" y="14"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 299 475)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-83" y="0">0.3777<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="46" y="0">µm</tspan></text>
</text></g>
<path d="M339,251 L339,107 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M347,415 C342,425 342,428 339,443 C336,428 336,425 331,415 C337,417 341,417 347,415 " fill="#000000" stroke="none"/>
<path d="M347,135 C342,125 342,122 339,107 C336,122 336,125 331,135 C337,133 341,133 347,135 " fill="#000000" stroke="none"/>
<path d="M339,443 L339,299 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 363 283)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-83" y="0">6.1346<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="40" y="0">µm</tspan></text>
</text></g>
<path d="M139,1455 C134,1465 134,1468 131,1483 C128,1468 128,1465 123,1455 C129,1457 133,1457 139,1455 " fill="#000000" stroke="none"/>
<path d="M131,1483 L131,1155 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M123,1455 C118,1465 118,1468 115,1483 C112,1468 112,1465 107,1455 C113,1457 117,1457 123,1455 " fill="#000000" stroke="none"/>
<path d="M115,1483 L115,1011 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M107,1455 C102,1465 102,1468 99,1483 C96,1468 96,1465 91,1455 C97,1457 101,1457 107,1455 " fill="#000000" stroke="none"/>
<path d="M99,1483 L99,819 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M91,1455 C86,1465 86,1468 83,1483 C80,1468 80,1465 75,1455 C81,1457 85,1457 91,1455 " fill="#000000" stroke="none"/>
<path d="M83,1483 L83,619 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M67,1483 L67,259 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M75,1455 C70,1465 70,1468 67,1483 C64,1468 64,1465 59,1455 C65,1457 69,1457 75,1455 " fill="#000000" stroke="none"/>
<path d="M819,555 L819,539 955,539 955,555 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M835,539 L835,491 931,491 931,539 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M827,747 L827,715 923,715 923,747 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M811,763 L811,747 947,747 947,763 z" fill="#cbf3f3" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cbf3f3"/>
<path d="M811,763 L811,747 947,747 947,763 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 971 555)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="0">cap2m</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 883 515)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-35" y="14">via4</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 875 731)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-35" y="14">via3</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 963 763)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="0">capm</tspan>
</text></g>
<path d="M691,1371 L603,1371 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M635,1295 C630,1305 630,1308 627,1323 C624,1308 624,1305 619,1295 C625,1297 629,1297 635,1295 " fill="#000000" stroke="none"/>
<path d="M627,1275 L627,1323 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M635,1399 C630,1389 630,1386 627,1371 C624,1386 624,1389 619,1399 C625,1397 629,1397 635,1399 " fill="#000000" stroke="none"/>
<path d="M627,1371 L627,1419 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 603 1347)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-83" y="14">0.4299</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="41" y="14"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<path d="M675,1451 L675,1627 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#666666"/>
<path d="M707,1451 L707,1659 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#666666"/>
<path d="M723,1451 L723,1659 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#666666"/>
<path d="M563,363 L611,363 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M643,363 L739,363 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M595,411 L643,411 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M659,411 L739,411 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M583,371 C593,366 596,366 611,363 C596,360 593,360 583,355 C585,361 585,365 583,371 " fill="#000000" stroke="none"/>
<path d="M615,419 C625,414 628,414 643,411 C628,408 625,408 615,403 C617,409 617,413 615,419 " fill="#000000" stroke="none"/>
<path d="M687,419 C677,414 674,414 659,411 C674,408 677,408 687,403 C685,409 685,413 687,419 " fill="#000000" stroke="none"/>
<path d="M671,371 C661,366 658,366 643,363 C658,360 661,360 671,355 C669,361 669,365 671,371 " fill="#000000" stroke="none"/>
<path d="M735,1619 C725,1614 722,1614 707,1611 C722,1608 725,1608 735,1603 C733,1609 733,1613 735,1619 " fill="#000000" stroke="none"/>
<path d="M647,1619 C657,1614 660,1614 675,1611 C660,1608 657,1608 647,1603 C649,1609 649,1613 647,1619 " fill="#000000" stroke="none"/>
<path d="M679,1651 C689,1646 692,1646 707,1643 C692,1640 689,1640 679,1635 C681,1641 681,1645 679,1651 " fill="#000000" stroke="none"/>
<path d="M751,1651 C741,1646 738,1646 723,1643 C738,1640 741,1640 751,1635 C749,1641 749,1645 751,1651 " fill="#000000" stroke="none"/>
<path d="M643,1643 L707,1643 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M723,1643 L803,1643 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M707,1611 L803,1611 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M675,1611 L611,1611 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1667,1035 L1619,1035 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1587,1035 L1507,1035 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1559,1043 C1569,1038 1572,1038 1587,1035 C1572,1032 1569,1032 1559,1027 C1561,1033 1561,1037 1559,1043 " fill="#000000" stroke="none"/>
<path d="M1647,1043 C1637,1038 1634,1038 1619,1035 C1634,1032 1637,1032 1647,1027 C1645,1033 1645,1037 1647,1043 " fill="#000000" stroke="none"/>
<g transform="matrix( 0.7 0 -0 0.7 827 1643)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="14">0.006<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="119" y="14">µm</tspan></text>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 827 1611)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="14">0.0431<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="127" y="14">µm</tspan></text>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 747 363)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="14">0.4223<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="137" y="14">µm</tspan></text>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 747 411)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="14">0.070<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="117" y="14">µm</tspan></text>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 1499 1035)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-146" y="14">0.030<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="-31" y="14">µm</tspan></text>
</text></g>
<path d="M1587,1179 L1507,1179 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1559,1187 C1569,1182 1572,1182 1587,1179 C1572,1176 1569,1176 1559,1171 C1561,1177 1561,1181 1559,1187 " fill="#000000" stroke="none"/>
<g transform="matrix( 0.7 -1.09102e-11 1.09102e-11 0.7 1499 1179)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-146" y="14">0.030<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="-31" y="14">µm</tspan></text>
</text></g>
<path d="M1667,1179 L1619,1179 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1647,1187 C1637,1182 1634,1182 1619,1179 C1634,1176 1637,1176 1647,1171 C1645,1177 1645,1181 1647,1187 " fill="#000000" stroke="none"/>
<path d="M1555,1283 L1555,1227 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1587,1251 L1587,1227 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1527,1243 C1537,1238 1540,1238 1555,1235 C1540,1232 1537,1232 1527,1227 C1529,1233 1529,1237 1527,1243 " fill="#000000" stroke="none"/>
<path d="M1615,1243 C1605,1238 1602,1238 1587,1235 C1602,1232 1605,1232 1615,1227 C1613,1233 1613,1237 1615,1243 " fill="#000000" stroke="none"/>
<path d="M1667,1235 L1587,1235 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1555,1235 L1507,1235 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1491 1235)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-146" y="14">0.075<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="-33" y="14">µm</tspan></text>
</text></g>
</g>
</svg>
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slides/index.html
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@ -96,9 +96,39 @@
<section data-markdown data-background='img/hype.jpg'>
## 🤩 Are you hyped enough? 🫨
* Semi-custom digital design
* Some technical bits
* Practical work (if ya fancy 😊)
</section>
</section>
<section data-background='img/back.svg'>
<section data-markdown>
# Some technical bits
* Meet the PDK
* Check out the workflows
</section>
<section>
<h2>Hello Sky130!</h2>
<img style="background-color:white;" src="img/sky130_stack.svg" height="500vh">
</section>
<section>
<h2>Semicustom workflow</h2>
<img style="background-color:white;" src="img/semicustom.svg" height="500vh">
</section>
<section>
<h2>Fullcustom workflow</h2>
<img style="background-color:white;" src="img/fullcustom.svg" height="500vh">
</section>
</section>
<section data-background='img/back.svg'>
<section data-markdown>